Fast inline testing with no compromises. Monitor wafer lifetime, sheet resistance and trapping with the comprehensive accuracy of an offline tool and an optimized industrial software package.
The calibrated measurements that have been
developed for the Sinton WCT-120 offline lifetime
tester can be applied inline, to accomplish
sophisticated process monitoring in an industrial
The WCT-IL800 offers a single large-area measurement of wafer lifetime which balances
the effects of grain boundaries or growth variations.
The measurement unit with its integrated excitation source may be mounted under or over
a wafer track, to characterize each passing wafer with our calibrated non-contact sensor.